Hybrid functional IrO2-TiO2 thin film resistor prepared by
atomic layer deposition for thermal inkjet printheads

Won-SubKWACK,Hyoung-SeokMOON,Seong-JunJEONG,Qi-minWANG,Se-HunKWON

Transactions of Nonferrous Metals Society of China ›› 2011, Vol. 21 ›› Issue (Special 1) : 88-91.

Transactions of Nonferrous Metals Society of China ›› 2011, Vol. 21 ›› Issue (Special 1) : 88-91.
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Hybrid functional IrO2-TiO2 thin film resistor prepared by
atomic layer deposition for thermal inkjet printheads

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2011, 21(Special 1): 88-91

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